Diseño y caracterización de un sistema de pulverización catódica DC para la deposición de películas delgadas de tierras raras y metales de transición Design and characterization of a DC sputtering system for deposition of thin fi lms of rare earth and transition metals /
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| Format: | Article |
| Language: | Spanish |
| Published: |
[Tolima] :
[Universidad Del Tolima],
[2009]
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| Online Access: | https://elibro.net/ereader/unanicaragua/94724 |
| Published: | Vol. 1, num. 4 (2009)- |
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| Physical Description: | 13-18 p. |
| Publication Frequency: | Anual |
| ISSN: | 1909-4841 |